液晶与显示2016，Vol.31Issue(11)：1033-1037,5.DOI:10.3788/YJYXS20163111.1033
大尺寸薄膜晶体管液晶显示器的一种条状显示不均的分析和改善研究
Analysis and improvement of a larger size TFT-LCD block mura
刘晓伟 1田明 1李梁梁 1付艳强 1郭会斌 1刘耀 1袁剑峰1
作者信息
- 1. 福州京东方光电科技有限公司，福建 福州 350000
- 折叠
摘要
Abstract
A new unknown block mura of large size TFT-LCD has been studied in this paper.The mura was observed by SEM,Four-probe tester and Spectrophotometer.It is caused by the periodic changing of TFT metal line thickness.The periodic changing of metal line thickness led to the chan-ging of LCD cell gap,influencing display quality of TFT-LCD.The periodic changing metal line thick-ness is caused by adopting the structure of a kind of flat target magnetron sputter equipment,which is used in large size TFT-LCD production line widely.The thickness uniformity of metal line was im-proved by modifying the equipment structure.The mura disappeared after the thickness uniformity is improved.关键词
大尺寸薄膜晶体管液晶显示器/磁控溅射/平面靶材/显示不均Key words
large size TFT-LCD/magnetron sputtering/flat target/Mura分类
信息技术与安全科学引用本文复制引用
刘晓伟,田明,李梁梁,付艳强,郭会斌,刘耀,袁剑峰..大尺寸薄膜晶体管液晶显示器的一种条状显示不均的分析和改善研究[J].液晶与显示,2016,31(11):1033-1037,5.
