摘要
Abstract
In order to take proper energy saving measures in design,building and running of TFT fac-tory and reduce energy consumption of the TFT device production effectively,this article takes the method of comparative analysis,by summarizing the energy consumption data of typical TFT-LCD and AMOLED production lines designed by CEEDI,analyzes how device structure and production technics impact the energy consumption in device production.The result shows that TFT array is the most important energy consuming process,and complexity of array process can be characterized by re-peat number of the mask.As repeat number of mask process increases,consumption of electric,ni-trogen and fresh water increase remarkably.Total energy consumption of LTPS and AMOLED device that adopt 10-13 mask technics can be up to 350% of those that adopt a-Si and Oxide technics.In all technic routes,electric is the most important energy that needed,which takes 80%-87% of total ener-gy consumption.Increased energy consumption leads to increase in energy costs.Now the country vig-orously promotes green economy,suggest TFT and AMOLED manufacturers take scientific energy control measures,not only to reduce energy consumption and cost,but also to achieve the healthy and sustainable development of TFT-LCD and AMOLED industry.关键词
TFT/LTPS/IGZO/AMOLED/综合能耗/单位产品能耗Key words
TFT-LCD/LTPS/IGZO/AMOLED/comprehensive energy consumption/energy con-sumption per unit product分类
信息技术与安全科学
