测试技术学报2016，Vol.30Issue(5)：427-431,5.DOI:10.3969/j.issn.1671-7449.2016.05.011
高灵敏度MEMS三维矢量风速计设计
Design of High-Sensitivity MEMS Tri-Axial Vector Anemometer
王任鑫 1白冰 2刘源1
作者信息
- 1. 中北大学 仪器科学与动态测试教育部重点实验室，山西 太原 030051
- 2. 中北大学 电子测试技术重点实测验室，山西 太原 030051
- 折叠
摘要
Abstract
In view of mine ventilation inspection,MEMS tri-axial vector anemometer inspired by imi-tate cricket's cerci hair is proposed to detect the wind velocity and direction.Cross beams are adopted and plate-like structure receives X/Y/Z airflow velocity signal,which could realize tri-axial high-sensitivity detection in terms of measuring bandwidth.Firstly,the theory for the detection of wind velocity and di-rection is provided by the analysis of sense principle of MEMS tri-axial vector anemometer.According to the tri-axial stress analysis,the piezoresistors are arranged on the beam to perform wheatstone bridge output.Consequently,the influences of plate diameter on the structure stress and resonant frequency are researched through ANSYS simulation.Finally,tri-axial sensitivities are compared in the case that the structure parameters are optimized.Simulation results demonstrate that plate-like structure is capa-ble of detecting tri-axial wind velocity,which could bring improvement on detecting dimension compa-ring to mono-axial and bi-axial anemometers.关键词
MEMS/三维矢量风速计/仪器灵敏度/矿井通风Key words
MEMS/tri-axial vector anemometer/instrument fsensitivity/mine ventilation分类
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王任鑫,白冰,刘源..高灵敏度MEMS三维矢量风速计设计[J].测试技术学报,2016,30(5):427-431,5.
