控制理论与应用2016，Vol.33Issue(9)：1171-1181,11.DOI:10.7641/CTA.2016.60104
具有多品种晶圆混合加工的单臂组合设备调度
Scheduling for single-armed cluster tools with mixed-processing of multi-variety wafers
摘要
Abstract
To improve the production efficiency of cluster tools, wafer residency time constraints considered and without PM sharing, scheduling of single-armed cluster tools with mixed-processing of multi-variety wafers are addressed. Firstly, a resource-oriented Petri net (ROPN) model is developed to describe the wafer fabrication process. Controlled transitions are introduced into models to avoid deadlock, and time is associated with places and transitions to model activity times. Secondly, workloads among the processing steps are balanced via virtual process modules. Analytic expressions for testing schedulability are derived based on the Petri net and backward scheduling strategy. Finally, a scheduling algorithm for the steady state is presented. Meanwhile, illustrative examples are given to verify the validity of the scheduling algorithm proposed.关键词
组合设备/Petri网/混合加工/调度/晶圆制造Key words
cluster tools/Petri net/mixed-processing/scheduling/wafer fabrication分类
信息技术与安全科学引用本文复制引用
潘春荣,王际鹏..具有多品种晶圆混合加工的单臂组合设备调度[J].控制理论与应用,2016,33(9):1171-1181,11.基金项目
国家自然科学基金项目(71361014,51665018),江西省教育厅项目(GJJ150673)资助 （71361014,51665018）
