太赫兹科学与电子信息学报2016，Vol.14Issue(5)：820-824,5.DOI:10.11805/TKYDA201605.0820
基于MEMS方块谐振器的10 MHz振荡器
A 10 MHz oscillator using square MEMS resonator
摘要
Abstract
The quality factor of square Micro Electromechanical System(MEMS) resonator is very high, whereas the insertion loss is very big. In order to obtain MEMS oscillator with low phase noise, the quality factor of square resonator is further improved, and the insertion loss is lowered. By reasonable designing, the exact support beam locations can minimize the anchor loss,and the proposed resonator achieves very high quality factor. The design method of Second-Mode Face Shear Square Micromechanical Resonator bears many advantages: higher quality factor and lower dynamic resistance(reaches 82.1Ω at 0.25μm gap). The oscillator based on this newly designed resonator achieves a lower phase noise: -156 dBc/Hz @1 kHz.关键词
微机电系统谐振器/二阶模态/锚点损耗/相位噪声Key words
Micro Electromechanical System resonator/second-mode/anchor loss/phase noise分类
信息技术与安全科学引用本文复制引用
鲍飞鸿,NGUYEN Tan-loc,李昕熠,潘明争,鲍景富..基于MEMS方块谐振器的10 MHz振荡器[J].太赫兹科学与电子信息学报,2016,14(5):820-824,5.基金项目
国家自然科学基金委员会和中国工程物理研究院联合基金资助项目(U1430102) （U1430102）
