强激光与粒子束2016，Vol.28Issue(12)：124002-1-124002-7,7.DOI:10.11884/HPLPB201628.160079
微孔阵列铜表面二次电子发射系数抑制研究
Study on secondary electron yield suppression of copper by micro-hole array
摘要
Abstract
It is of great importance to reduce secondary electron yield (SEY)of metals in order to improve performance of e-lectronic vacuum devices.This paper focuses on the experimental study on SEY suppression of copper.First,by using the Casino software,the SEY of square hole array surface was simulated under normal incident primary electron with energy of 0.5,3 keV respectively.The aspect ratio and porosity dependence of the intrinsic SEY (ISEY),backscattered SEY (BSEY)and total SEY (TSEY)were obtained.Second,by using the photolithography process in semiconductor industry,various circular hole arrays were fabricated on copper foil and their surface morphology were characterized using a laser scanning microscope,their SEY were measured on SEY test platform.Simulation results show that:with increasing aspect ratio and porosity,the SEY suppression effect can be enhanced;when aspect ratio is becoming large enough,the SEY tend to be saturated;the SEY suppression effect is more obvious when incident energy is low.Measurement results show that the micro-hole array surface can effectively suppress the SEY of copper and experimental results agrees qualitatively with simulation results.关键词
二次电子抑制/微孔阵列/Casino 模拟/铜Key words
secondary electron suppression/micro-hole array/Casino simulation/copper分类
数理科学引用本文复制引用
王泽卫,叶鸣,陈亮,贺永宁,崔万照,张忠兵..微孔阵列铜表面二次电子发射系数抑制研究[J].强激光与粒子束,2016,28(12):124002-1-124002-7,7.基金项目
国家自然科学基金项目 （）
