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Influence of thickness on strain state and surface morphology of AlN grown by HvPE

Sun Maosong Zhang Jicai Huang Jun Li Xuewei Wang Linjun Liu Xuehua Wang Jianfeng

半导体学报（英文版）2016，Vol.37Issue(12)：18-21,4.

半导体学报（英文版）2016，Vol.37Issue(12)：18-21,4.DOI:10.1088/1674-4926/37/12/123001

Influence of thickness on strain state and surface morphology of AlN grown by HvPE

Sun Maosong ¹Zhang Jicai ²Huang Jun ³Li Xuewei ⁴Wang Linjun ²Liu Xuehua ²Wang Jianfeng⁵

作者信息

1. School of Materials Science and Engineering, Shanghai University, Shanghai 200444, China
2. platform for Characterization and Test, Suzhou Institute of Nano-Tech and Nano-Bionics, CAS, Suzhou 215123, China
3. platform for Characterization and Test, Suzhou Institute of Nano-Tech and Nano-Bionics, CAS, Suzhou 215123, China
4. Suzhou Nanowin Science and Technology Co, Ltd, Suzhou 215123, China
5. School of Materials Science and Engineering, Shanghai University, Shanghai 200444, China
折叠

摘要

关键词

AlN/ HVPE/ surface morphology/ strain state

Key words

AlN/ HVPE/ surface morphology/ strain state

引用本文复制引用

Sun Maosong,Zhang Jicai,Huang Jun,Li Xuewei,Wang Linjun,Liu Xuehua,Wang Jianfeng..Influence of thickness on strain state and surface morphology of AlN grown by HvPE[J].半导体学报（英文版）,2016,37(12):18-21,4.

基金项目

Project supported by the National Basic Research Program of China (No.2012CB619305),the National Natural Science Foundation of China (Nos.61274127,61474133,61325022),and the CAS Project of Introduction of Outstanding Technical Talent. （No.2012CB619305）

半导体学报（英文版）

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ISSN：1674-4926

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