中国机械工程2016，Vol.27Issue(22)：2990-2993,2994,5.DOI:10.3969/j.issn.1004-132X.2016.22.002
激光诱导精密沉积铜箔实验
Experiments on Laser Induced Precision Transfer of Cu Film
摘要
Abstract
The experiments on the LIFT of Cu film were carried out through changing pulse ener-gy and defocus distances.The materials transferred on the quartz substrate and the restraint layers were investigated,and the effects of pulse energy and defocus distances were analyzed by the optical microscope and scanning electron microscope.The mechanism of LIFT was discussed based on the ex-perimental results.A transfer dot of about 10μm is found,and which is much smaller than the focal radius.The transferred materials are found on both of the substrate and the restraint layers,which means that there exists a backward transfer process along with forward transfer.With pulse energy in-creasing,the materials deposited on the substrate become more scattered,and the distribution of the deposition dots tend to form a ring.When the enlarging focal distances are enlarged,the ring disap-pears,and the deposition area shrinks below the foal radius.And a micro array was successfully fabri-cated using the LIFT method.关键词
激光诱导向前转移/脉冲能量/精密沉积/微细阵列Key words
laser induced forward transfer(LIFT)/pulse energy/precise deposition/micro-array分类
信息技术与安全科学引用本文复制引用
黄志刚,李洪辉,印四华,郭钟宁..激光诱导精密沉积铜箔实验[J].中国机械工程,2016,27(22):2990-2993,2994,5.基金项目
国家自然科学基金资助项目(11172072,51175091) （11172072,51175091）
