工程科学学报2016，Vol.38Issue(11)：1629-1635,7.DOI:10.13374/j.issn2095-9389.2016.11.017
氩氢摩尔比对直流电弧等离子体喷射法等离子体放电特征影响的计算
Calculation of the influence of argon-to-hydrogen mole ratio on the discharge characteristics of plasma in DC arc plasma jet
摘要
Abstract
The effect of argon-to-hydrogen mole ratio on the discharging behavior of argon- hydrogen plasma was simulated and studied on the assumption that argon-hydrogen plasma is in a local thermodynamic equilibrium. The kinetic theory of ideal gases and the classical Chapman-Enskog method were employed in the study. The plasma thermodynamic and transport parameters consistent with the actual condition of the DC arc plasma jet method were firstly found, and secondary development was made on FLUENT software platform. Equations, like current continuum and Ampere’s law, and source items, like Lorentz force and Joule heat, which are associated with electromagnetic fields were also taken into account. The results show that when the gas pressure and operating cur-rent are 8 kPa and 150 A, respectively, and the argon-to-hydrogen mole ratio changes from 3:1 to 1:3, the maximum flow rate of plas-ma increases from 829 to 1127 m·s-1 , the maximum temperature falls from 20600 K to 16800 K, and the heating capacity of the DC arc improves while the substrate surface temperature uniformity deteriorates. Under the other conditions being unchanged, when the argon-to-hydrogen ratio is 1:2, a relatively uniform and proper substrate surface temperature can be obtained for the growth of diamond films.关键词
等离子体喷射/放电特性/氩/氢/数值模拟Key words
plasma jet/discharge characteristics/argon/hydrogen/numerical simulation分类
信息技术与安全科学引用本文复制引用
郭建超,刘金龙,朱涛,陈良贤,魏俊俊,李成明,王海兴..氩氢摩尔比对直流电弧等离子体喷射法等离子体放电特征影响的计算[J].工程科学学报,2016,38(11):1629-1635,7.基金项目
国家自然科学基金资助项目(51272024) （51272024）
