传感技术学报2016，Vol.29Issue(11)：1637-1642,6.DOI:10.3969/j.issn.1004-1699.2016.11.002
真空封装MEMS陀螺高温老化失效机理研究
Research of High Temperature Aging Failure Mechanism about Vacuum Packaging MEMS Gyroscope
摘要
Abstract
In order to learning the aging failure mechanism of vacuum packaging MEMS gyroscopes,here we start an accelerating experiment on gyroscopes in high temperature 125℃,and extracting the key performance parame⁃ters of gyroscope in different period. The analysis shows that high temperature brings about leakage,fatigue and stress relief of MEMS gyroscopes’inside materials,changes the quality factor and beginning detecting capacitance, finally leads to the serious degradation of gyroscopes’key performance,such as bias,angle random walk,bias sta⁃bility,scale factor,which provides theoretical basis for improving the performance and reliability of gyroscopes. In engineering practice,this paper has a certain practical reference.关键词
微机械陀螺/老化/真空封装/失效机理Key words
micro mechanical gyroscope/aging/vacuum packaging/failure mechanism分类
信息技术与安全科学引用本文复制引用
谷专元,何春华,陈俊光,赵前程,张大成,闫桂珍..真空封装MEMS陀螺高温老化失效机理研究[J].传感技术学报,2016,29(11):1637-1642,6.基金项目
国家自然基金项目（61434003）；电子元器件可靠性物理及其应用技术重点实验室开放基金项目 （）
