航空材料学报2016，Vol.36Issue(6)：74-78,5.DOI:10.11868/j.issn.1005-5053.2016.6.012
Ag/TiO2/ITO紫外探测器的制备及其光电性能
Preparation of Ag/TiO2/ITO UV Detector and Its Photoelectronic Properties
摘要
Abstract
TiO2-based UV detectors with Ag antidot/TiO2/ITO sandwich structure were prepared by RF magnetron sputtering and col-loidal crystal template technology. The microstructure and photoelectronic properties of the UV detectors were investigated by SEM, XRD, four point probe and semiconductor parameter instrument. The experimental results show that pore size of Ag antidot has an obvi-ous effect on the photoelectronic properties of the detectors. With the increase of pore size, the dark current increases and the response time is prolonged, while the photocurrent is increased at first, then is decreased. Meanwhile, it is found that photoelectronic properties are optimum when the pore size is 4. 2 μm. Antidot array electrodes with large pore size possess higher electrical conductivity, lower ultraviolet transmittance and higher recombination probability of electron-hole pair. Therefore, the pore size variation exhibits signifi-cant effluence on the photoelectronic properties of the UV detector.关键词
反点阵列/Ag/TiO2/ITO/紫外探测器/光电特性Key words
antidot array/Ag/TiO2/ITO/ultraviolet ( UV) photo-detector/photoelectronic property分类
信息技术与安全科学引用本文复制引用
戴松喦,祁洪飞,刘大博,滕乐金,罗飞,田野,陈冬生..Ag/TiO2/ITO紫外探测器的制备及其光电性能[J].航空材料学报,2016,36(6):74-78,5.基金项目
中国航空工业集团公司创新基金( JK65150307) （ JK65150307）
北京航空材料研究院创新基金(KJSJ140311) （KJSJ140311）
