光学精密工程2016，Vol.24Issue(11)：2636-2643,8.DOI:10.3788/OPE.20162411.2636
全频段亚纳米精度氟化钙材料加工
Sub-nanometer precision optical fabrication of CaF 2 materials
摘要
Abstract
When CaF2 materials are used in projection lenses ,the performance of the projection lenses can be improved greatly .This paper researches the process of CaF 2 crystal fabrication to realize its high precision optical fabrication in all wave bands .Firstly ,the pitch lap and the diamond powder were used to get a relative better figure and surface quality of a CaF 2 element .Then ,the technological parameters of the polishing lap ,such as rotation speed ,movement range and pressure were optimized , and the colloidal silica was used in polishing to reduce the high frequency errors in the CaF 2 element , remove the scratch in machining and to obtain a smaller mid-spatial error and smaller higher frequency roughness .Finally ,the ion beam figuring technique was used to repair finely the surface figure of the element meanwhile maintaining the high frequency error in the CaF 2 element .The Experiments were conduct on a CaF2 crystal plane with a diameter of 100 mm ,and the results indicate that its 37 Zernike fit error and the Zernike residual error reach to 0 .39 nm RMS and 0 .43 nm RMS ,respectively ,and the roughness reaches to 0 .31 nm on average . These results satisfy the nanometer machining requirements of the projection lens ,and lay a basis for development of the high performance projection lenses .关键词
氟化钙/投影光刻物镜/精密光学加工/亚纳米精度加工/离子束修形(IBF)Key words
CaF2/projection lens/precision optical fabrication/sub-nanometer precision fabrication/Ion Beam Figuring (IBF)分类
信息技术与安全科学引用本文复制引用
张春雷,徐乐,刘健,马占龙,王飞,谷永强,代雷,彭石军..全频段亚纳米精度氟化钙材料加工[J].光学精密工程,2016,24(11):2636-2643,8.基金项目
国家科技重大专项 （）
