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多级真空发生器的抽气性能研究

李昊军 滕燕

机械制造与自动化Issue(6):229-232,238,5.
机械制造与自动化Issue(6):229-232,238,5.

多级真空发生器的抽气性能研究

Extraction Performance of Multistage Vacuum Generator

李昊军 1滕燕1

作者信息

  • 1. 南京理工大学 机械工程学院,江苏,南京210094
  • 折叠

摘要

Abstract

Compared with the single stage vacuum generator,Multistage vacuum generator has the advantage of strong pumping ca ̄pacity. However, the blind selection of the vacuum generator exists in the industrial production. In this paper, the static flow of a three-grade vacuum generator is researched on and a mathematical relationship of the output press and the flow is derived to dem ̄onstrate the flow characteristics of multiple-grade vacuum generator. The mathematical models of chambers in the situations with and without flow resistance and the vacuum degree of the three-grade vacuum varying with time under the both situations are ac ̄quired.

关键词

多级真空发生器/真空元件/流量特性/吸附响应时间

Key words

multistage vacuum generator/vacuum components/flow characteristic/the response time

分类

信息技术与安全科学

引用本文复制引用

李昊军,滕燕..多级真空发生器的抽气性能研究[J].机械制造与自动化,2016,(6):229-232,238,5.

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