电子器件2016，Vol.39Issue(6)：1287-1291,5.DOI:10.3969/j.issn.1005-9490.2016.06.002
比较法研究微细尺度氮化硅表面自然对流换热
Investigation of Naturel Convention Heat Transfer Around Microscale Silicon Nitride Surface Using Comparative Method
摘要
Abstract
Microscale natural convetion heat transfer is very different with that at macro scale. Comparative method is used to investigate naturel convention heat transfer around horizontal surface of the microscale silicon nitride. Micro Hot Plate(MHP)with activity area of 43.5 μm×43.5 μm,which is manufactured by standard CMOS and simple post-CMOS processes,is used for measurement.And accuracy of the method is studied by finite element simulation. The results show that the air conductance of horizontal silicon nitride surface is 2.63 × 10-5 W/K. The naturel convention coefficient is 1.39×104 W/(m2·K),which is much larger than that at macro scale.关键词
微细尺度/自然对流换热/比较法/微热板Key words
microscale/naturel convention heat transfer/comparative method/micro-hotplate分类
信息技术与安全科学引用本文复制引用
黄正兴,关经纬,吴昊,余隽,唐祯安..比较法研究微细尺度氮化硅表面自然对流换热[J].电子器件,2016,39(6):1287-1291,5.基金项目
本项目得到国家自然科学基金项目(61131004) （61131004）
中央高校基本科研业务费项目(DUT14LAB11) （DUT14LAB11）
