液晶与显示2016，Vol.31Issue(12)：1118-1123,6.DOI:10.3788/YJYXS20163112.1118
具有管控液晶面板设备工艺参数的制造执行系统的技术研究
Manufacturing execution system with the parameter control of TFT LCD equipments
陈蔚 1张雯旭 1冯举 1张璞1
作者信息
- 1. 成都京东方光电科技有限公司 自动化技术部，四川 成都 611731
- 折叠
摘要
Abstract
Due to the high cost of the TFT LCD materials,different types of parameters and the un-controlled parameters in the frequent change.Companies will make huge loss if they can not manage all the factors well during the production.This paper proposes a real-time intelligent design method of parameter control by adding extra modules,so that manufacturing execution system(MES)can timely monitor the process parameters,analysis data and reduce human risk factors.Therefore,the stability of the production process will be improved with real-time control.关键词
液晶显示/制造执行系统/工艺参数/实时管控Key words
TFT LCD/manufacturing execution system/process parameter/real-time control分类
信息技术与安全科学引用本文复制引用
陈蔚,张雯旭,冯举,张璞..具有管控液晶面板设备工艺参数的制造执行系统的技术研究[J].液晶与显示,2016,31(12):1118-1123,6.
