液晶与显示2016，Vol.31Issue(12)：1124-1130,7.DOI:10.3788/YJYXS20163112.1124
H2 O2对溶液法制备 a-IGZO 薄膜光学特性的影响
Influence of hydrogen peroxide on optical properties of a-IGZO thin films by solution Process
摘要
Abstract
The a-IGZO films were fabricated by solution method and high-pressure annealing process, and the effects of H 2 O 2 on microstructural and optical properties of the a-IGZO films were studied by spectroscopic ellipsometry and atomic force microscope (AFM).Results indicated that when the an-nealing temperature was increased from 220 ℃ to 300 ℃,the optical band gap of the film was in-creased from 3.03 eV to 3.29 eV,the roughness was decreased from 20.69 nm to 4.68 nm.Compared to the film without H 2 O 2 ,the refractive of the film with H 2 O 2 was increased and the roughness was de-creased obviously under the same high-pressure annealing process,the optical band gap of the film was increased from 3.29 eV to 3.34 eV,but the surface roughness was decreased from 4.68 nm to 2.89 nm at 300 ℃.Therefore,employing H 2 O 2 in the solution could effectively minimize organic chemical residues and pores at lower temperatures,as well as form more dense a-IGZO film.All experiment re-sults indicated that H 2 O 2 could decrease the temperature of treatment when depositing a-IGZO films by solution method.关键词
a-IGZO 薄膜/H2O2 溶液/椭圆偏振光谱/致密性Key words
a-IGZO film/H 2 O 2 solution/spectroscopic ellipsometry/dense分类
信息技术与安全科学引用本文复制引用
汤猛,李勇男,殷波,钟传杰..H2 O2对溶液法制备 a-IGZO 薄膜光学特性的影响[J].液晶与显示,2016,31(12):1124-1130,7.基金项目
国家自然科学基金资助项目(No．60776056) Supported by National Natural Science Foundation of China(No．60776056) （No．60776056）
