传感技术学报2016，Vol.29Issue(12)：1822-1826,5.DOI:10.3969/j.issn.1004-1699.2016.12.007
新型体声波传感器读出电路的实验验证
Experimental Validation of Novel Bulk Acoustic Wave Sensor Read-Out Circuit*
摘要
Abstract
In order to experimentally verify the feasibility of the scheme of the new BAW sensor readout circuit based on six-port reflector,a new type of BAW sensor readout circuit was fabricated and tested. The film bulk acous?tic resonator(FBAR)with series resonant frequency is about 1.5 GHz is the device under test(DUT). Microstrip six port network and detector on PCB are designed and fabricated,which can meet the requirements of FBAR resonant frequency measurement bandwidth(1.3 GHz~1.7 GHz). Measurement result of the reflection coefficient frequency (Γ-f)curve of the simulated DUT(50ΩSMA matched load)is obtained by using radio frequency signal generator and oscilloscope. The measurement result from six-port reflectometer is quite consistent with the measurement re?sult from vector network analyzer(VNA).Thus the scheme that"the BAW sensor readout circuit based on six-port reflectometer"can be used for the measurement of FBAR resonant frequency is verified by experiment. The work re?ported is useful for the practical BAW sensor development and the vector network analyzer on the chip(VNA-on-chip)design.关键词
BAW传感器/薄膜体声波谐振器/读出电路/六端口网络/六端口反射计/矢量网络分析仪Key words
bulk acoustic wave(BAW)sensor/thin-film bulk acoustic wave resonator(FBAR)/read-out circuit/six-port network/six-port reflectometer/vector network analyzer分类
信息技术与安全科学引用本文复制引用
高杨,黄振华,尹汐漾..新型体声波传感器读出电路的实验验证[J].传感技术学报,2016,29(12):1822-1826,5.基金项目
国家自然科学基金项目(61574131) （61574131）
中国工程物理研究院超精密加工技术重点实验室基金项目(2014ZA001) （2014ZA001）
核探测与核电子学国家重点实验室开放课题基金项目(2016KF02) （2016KF02）
西南科技大学特殊环境机器人技术四川省重点实验室开放基金项目(14zxtk01) （14zxtk01）
