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沟槽栅MOSFET器件SPICE模型

刘超 张春伟 刘斯扬 孙伟锋

东南大学学报(英文版)2016,Vol.32Issue(4):408-414,7.
东南大学学报(英文版)2016,Vol.32Issue(4):408-414,7.DOI:10.3969/j.issn.1003-7985.2016.04.003

沟槽栅MOSFET器件SPICE模型

SPICE model of trench-gate MOSFET device

刘超 1张春伟 1刘斯扬 1孙伟锋1

作者信息

  • 1. 东南大学国家专用集成电路系统工程技术研究中心,南京210096
  • 折叠

摘要

Abstract

A novel simulation program with an integrated circuit emphasis ( SPICE ) model developed for trench-gate metal-oxide-semiconductor field-effect transistor ( MOSFET ) devices is proposed. The drift region resistance was modeled according to the physical characteristics and the specific structure of the trench-gate MOSFET device. For the accurate simulation of dynamic characteristics, three important capacitances, gate-to-drain capacitance Cgd , gate-to-source capacitance Cgs and drain-to-source capacitance Cds , were modeled, respectively, in the proposed model. Furthermore, the self-heating effect, temperature effect and breakdown characteristic were taken into account; the self-heating model and breakdown model were built in the proposed model; and the temperature parameters of the model were revised. The proposed model is verified by experimental results, and the errors between measured data and simulation results of the novel model are less than 5%. Therefore, the model can give an accurate description for both the static and dynamic characteristics of the trench-gate MOSFET device.

关键词

沟槽栅MOSFET/SPICE模型/漂移区电阻模型/动态模型

Key words

trench-gate metal-oxide-semiconductor field-effect transistor ( MOSFET )/simulation program with integrated circuit emphasis ( SPICE ) model/drift region resistance model/dynamic model

分类

信息技术与安全科学

引用本文复制引用

刘超,张春伟,刘斯扬,孙伟锋..沟槽栅MOSFET器件SPICE模型[J].东南大学学报(英文版),2016,32(4):408-414,7.

基金项目

The National Natural Science Foundation of China ( No.61604038), China Postdoctoral Science Foundation ( No.2015M580376), the Natural Science Foundation of Jiangsu Province ( No. BK20160691), Jiangsu Postdoctoral Science Foundation ( No.1501010A) ( No.61604038)

东南大学学报(英文版)

1003-7985

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