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铜基体表面 CVD 单晶金刚石微粉的制备

申笑天 沈彬 王新昶 赵天奇 孙方宏

金刚石与磨料磨具工程2016,Vol.36Issue(6):20-24,5.
金刚石与磨料磨具工程2016,Vol.36Issue(6):20-24,5.DOI:10.13394/j.cnki.jgszz.2016.6.0005

铜基体表面 CVD 单晶金刚石微粉的制备

Preparation of CVD microcrystalline diamond powders on Cu substrates

申笑天 1沈彬 1王新昶 1赵天奇 1孙方宏1

作者信息

  • 1. 上海交通大学 机械与动力工程学院,上海 200240
  • 折叠

摘要

Abstract

Ultrasonic grinding pretreatment is applied on Cu substrates to deposit microcrystalline diamonds with self-nucleation method by hot filament chemical vapor deposition HFCVD It is show that without ultrasonic grinding pretreatment only a few microcrystalline diamonds can be deposited on the Cu substrate When the duration of pretreatment is about 1 min a large amount of microcrystalline diamonds is deposited on the substrates simultaneously However when the duration of pretreatment is more than 2 min too many diamonds are deposited and there forms a diamond film on the substrate The microcrystalline diamonds deposited by CVD methods exhibit a cubo-octahedral morphology and have the euhedral diamond faces with 111 and 100.

关键词

金刚石微粉/热丝化学气相沉积法/表面预处理/形核密度

Key words

diamond powders/hot filament chemical vapor deposition/surface pretreatment/nucleation density

分类

化学化工

引用本文复制引用

申笑天,沈彬,王新昶,赵天奇,孙方宏..铜基体表面 CVD 单晶金刚石微粉的制备[J].金刚石与磨料磨具工程,2016,36(6):20-24,5.

基金项目

国家自然科学基金项目(项目编号51275302) (项目编号51275302)

金刚石与磨料磨具工程

OACSTPCD

1006-852X

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