金刚石与磨料磨具工程2016，Vol.36Issue(6)：25-28,34,5.DOI:10.13394/j.cnki.jgszz.2016.6.0006
化学机械抛光超薄 SUS304不锈钢抛光液研究
Polishing slurry of chemical mechanical polishing SUS304 ultrathin stainless steel sheet
摘要
Abstract
Flexible display has become a research hot spot as next generation display technology and stainless steel is one of the main materials of flexible large size display substrate To realize a super-smooth no-damage surface on stainless steel chemical mechanical polishing CMP is adopted The influence of abrasive size and contents of dispersion agent oxidant agent abrasive and corrosion inhibitor agent on the material removal rate and the surface roughness of CMP 304 stainless steel had been studied by orthogonal tests The results show that abrasive size has the most significant effect on the surface roughness followed by contents of H2O2 glycerol oxalic acid abrasive in turn The abrasive size has the maximum effect on the material removal rate followed by contents of abrasive glycerol oxalic acid and H2O2.关键词
304 不锈钢片/化学机械抛光/抛光液/材料去除率/表面粗糙度Key words
304 stainless steel/chemical mechanical polishing/polishing liquid/material removal rate/surface roughness分类
矿业与冶金引用本文复制引用
秦洪权,王永胜,李庆,陈佳鹏,刘振辉,苏建修..化学机械抛光超薄 SUS304不锈钢抛光液研究[J].金刚石与磨料磨具工程,2016,36(6):25-28,34,5.基金项目
国家自然科学基金面上项目资助(NO.51375149) （NO.51375149）
