实验科学与技术2016，Vol.14Issue(6)：21-23,66,4.DOI:10.3969/j.issn.1672-4550.2016.06.006
霍尔效应测试的系统误差分析
Analyzing Systematic Errors of Hall Effect Testing System
摘要
Abstract
Electric properties of thin films,such as resistivity,effective carriers density and carrier mobility,can be obtained by using Hall Effect to test thin film samples.But the test results have unavoidable errors affected by computational formulas and the reso-lution of testing instrument.This paper analyzes the systematic errors caused by computational formulas and the resolution of testing in-strument in VDP test and Hall effect test,and thus obtains the error of test rsults.关键词
范德保法/霍尔效应/系统误差/薄膜/电学性质Key words
Van Der Pauw/Hall effect/systematic errors/film/electric properties分类
数理科学引用本文复制引用
王文武,郁骁琦,任胜强,武莉莉,李卫,张静全..霍尔效应测试的系统误差分析[J].实验科学与技术,2016,14(6):21-23,66,4.基金项目
国家高技术研究发展计划专项经费资助（2015AA050610）。 （）
