实验科学与技术2016，Vol.14Issue(6)：43-45,92,4.DOI:10.3969/j.issn.1672-4550.2016.06.012
采用 Zygo 干涉仪测量 LCOS 相位调制特性的研究
Research of Measuring Phase Modulation Characteristic of LCOS by Zygo Interferometer
摘要
Abstract
This paper introduces the basic structure and light wave modulation principle of liquid crystal on silicon(LCOS)de-vice.When the polarization direction of light wave is accordant with the optic axisof liquid crystal polymer,LCOS is under phase -only modulation model.This paper also introduces the principle of Zygo interferometer phase -difference measurement,measures the phase modulation characteristics with American Zygo interferometer of RL -SLM-R2 reflection pure -phase LCOS produced by Beijing Re-allight Technology Co.,Ltd,revises the measuring results according to the interferometer principle,and gets the accurate phase char-acteristic curve,of which the modulation range is 0 -0.7154λ.This experiment creates a new method for measuring phase modulation, which can help better utilize LCOS.关键词
信息光学/液晶空间光调制器/纯相位调制/Zygo 干涉仪/调制特性Key words
information optics/liquid crystal spatial light modulator/phase -only modulation/Zygo interferometer/modulation characteristic分类
数理科学引用本文复制引用
殷路安,朱力行,吴建宏..采用 Zygo 干涉仪测量 LCOS 相位调制特性的研究[J].实验科学与技术,2016,14(6):43-45,92,4.基金项目
江苏省高等学校大学生实践创新训练计划项目。 （）
