传感技术学报2017，Vol.30Issue(1)：20-25,6.DOI:10.3969/j.issn.1004-1699.2017.01.004
基于表面介孔SnO2改性层的高选择性MOS氢气传感器∗
Highly Selective MOS Gas Sensors to Hydrogen Using the Mesoporous SnO2 Modified Layers
摘要
Abstract
The mesoporous SnO2 powders were prepared by sol￣gel method,and they were printed on the surface of the commercial SnO2 gas sensors by screen printing technology as the modified layers. The effect of the thickness of the modified layers on the hydrogen selectivity of the gas sensors was studied by testing ethanol,acetone,benzene and hydrogen. When the thickness of the mesoporous SnO2 modified layer is about 15μm,the selectivity coefficient of the gas sensor to hydrogen could be reached 5.7 at 300℃. The mechanism of the selectivity improvement of the gas sensors to hydrogen was also discussed.关键词
气体传感器/介孔SnO2/氢气/选择性Key words
gas sensor/mesoporous SnO2/hydrogen/selectivity分类
信息技术与安全科学引用本文复制引用
黄彬彬,张覃轶,薛妞子,张顺平..基于表面介孔SnO2改性层的高选择性MOS氢气传感器∗[J].传感技术学报,2017,30(1):20-25,6.基金项目
教育部留学回国人员科研启动基金项目(2015j0004) （2015j0004）
