传感技术学报2017，Vol.30Issue(1)：26-30,5.DOI:10.3969/j.issn.1004-1699.2017.01.005
基于磁导调制的直线式时栅位移传感器∗
Linear Time Grating Displacement Sensor Based on Permeability Modulation
摘要
Abstract
In order to meet the demand of precise displacement measurement in the harsh environment, solve the problem that current measuring methods are difficult to balance the wide measuring range and measuring precision, and overcome the disadvantages of manufacturing difficulty due to small grating pitch,a new method,coupling two standing waves to electrical traveling wave based on permeability modulation,was proposed and a novel linear time grating displacement sensor was designed. According to the principle of sensor measurement which was derived,the basic structure of sensor was designed. The 3D magnetic field simulation software Ansoft Maxwell is adopted to build a simulation model of the sensor. Using fast Fourier transform( FFT) to analyze the error of simulation results and trace to the source. According to the analysis results,the model structure was optimized and the simulation results are verified.According to the optimization model,The sensor was manufactured and the experimental platform was built to verify the experimental results. The experiment results show that the measurement accuracy reaches 600 nm in the range of 200 mm. The sensor produces easily and cost low,which has important practical value in practical engineering.关键词
时栅位移传感器/高精度/大量程/磁导调制/误差特性Key words
time￣grating displacement sensor/high precision measurement/long range/permeability modulation/error characteristic分类
机械制造引用本文复制引用
陈锡侯,曹焕,武亮,朱海..基于磁导调制的直线式时栅位移传感器∗[J].传感技术学报,2017,30(1):26-30,5.基金项目
国家自然科学基金项目(51675071,51405049)；重庆市科技研发基地能力提升计划( cstc2014pt－sy40002) （51675071,51405049）
