传感技术学报2017，Vol.30Issue(1)：35-38,4.DOI:10.3969/j.issn.1004-1699.2017.01.007
用于薄液膜检测的同轴环盘电导传感器优化设计∗
Optimization Design of Coaxial Ring￣Disk Conductance Sensor for Thin Film Measurement
摘要
Abstract
The liquid film thickness is an important parameter for the study of the evolution and development of the annular flow film,based on the range of annular flow film thickness,a non￣intrusive coaxial ring￣disk film sensor utilizing conductance method was designed. The electrode structure parameters of the measurementsensor were opti￣mized and determined by the finite element method. Experimental results show that the sensor has a high sensitivity in the range of 50μm~200μm liquid film thickness. The prediction error of the film thickness was within ±3.7%.关键词
物理量传感器/液膜厚度检测/COMSOL/同轴环盘电极Key words
physical sensor/liquid film thicknessdetection/COMSOL/coaxial ring￣disk electrode分类
信息技术与安全科学引用本文复制引用
王超,王青天,赵宁,胡凤红..用于薄液膜检测的同轴环盘电导传感器优化设计∗[J].传感技术学报,2017,30(1):35-38,4.基金项目
国家自然科学基金项目(51506148,61627803)；天津市自然科学基金项目(15JCYBJC19200)；河北省教育厅青年基金项目( QN2015216) （51506148,61627803）
