传感技术学报2017，Vol.30Issue(1)：39-43,5.DOI:10.3969/j.issn.1004-1699.2017.01.008
低g值微惯性开关中阿基米德平面螺旋梁的设计∗
Design of Archimdes Planar Micro￣Springs Used in Lowg Micro Inertia Switch
摘要
Abstract
Aimed at the micro￣spring with stiffness down to(0.1~10)N/m magnitude in low￣g micro inertia switch, a planar micro￣spring based on the Archimdes planar helical spring is designed. The elastic coefficient formula is derived with the Castigliano’s theory and the linear elasticity theory of material mechanics,and compared with the ANSYS finite element method simulation results. A micro inertia switch with acceleration threshold of 5.5 gn supported with three Archimdes planar micro￣springs is designed and fabricated based on SOI wafer and anodic bonding of glass￣silicon￣glass. Acceleration threshold of the fabricated micro inertia switch is measured with a centrifuge and compared with the designed value. The theoretically calculated results using the derived elastic coefficient formula agree well with the ANSYS simulation results,and acceleration threshold of the designed inertia switch agrees with the measurement results. The elastic coefficient of the designed and fabricated Archimdes planar helical spring is about 0.8 N/m. It conforms to the low stiffness requirement of low￣g micro inertia switch. The derived elastic coeffi￣cient formula can be used in the design of low￣g micro inertia switch with Archimdes planar helical springs.关键词
微惯性开关/阿基米德/卡氏定理/平面螺旋梁/微弹簧Key words
micro inertia switch/Archimdes/Castigliano’s theorem/planar helical spring/micro spring分类
信息技术与安全科学引用本文复制引用
张凤田,熊壮,金伟锋,唐彬..低g值微惯性开关中阿基米德平面螺旋梁的设计∗[J].传感技术学报,2017,30(1):39-43,5.基金项目
中国工程物理研究院科学技术发展基金项目(2012A0403018) （2012A0403018）
