传感技术学报2017，Vol.30Issue(1)：44-47,4.DOI:10.3969/j.issn.1004-1699.2017.01.009
基于基片集成波导和消逝模谐振腔的压力传感器设计∗
Pressure Transducer Based on Substrate Integrated Waveguide and Evanescent Mode Resonator
摘要
Abstract
The paper demonstrates a new pressure sensing structure based on substrate integrated waveguide( SIW) and evanescent mode resonator is designed with cylindrical air cavity, which makes the frequency of evanescent mode resonator tunable. Coplanar waveguide( CPW) is used as coupling unit to incent the resonator and transmit the output signal. By measuring the return loss ( S11 ) of the sensor, the frequency￣pressure characteristic could be obtained. Ansoft High frequency structure simulator( HFSS) is used to simulate and optimize the sensor structure. The dimension of pressure sensor is 30 mm×30 mm×1.93 mm,which reduced much volume compared to the tradi￣tional resonator. The material used is Rogers 4003C and then the sensor is fabricated by using PCB technology. A pressure measurement platform is setup to test the sensor. The measured resonant frequency changes 100 MHz at the pressure range of 0~3 N with absolute sensitivity of 25 MHz/N. It appears that the simulated data fits well with the experimental data,which confirms the feasibility of this kind of pressure sensing structure.关键词
压力传感器/基片集成波导/消失模谐振腔/频率测量/共面波导耦合Key words
pressure sensor/substrate integrated waveguide/evanescent mode resonator/frequency measurement/coplanar waveguide coupling分类
信息技术与安全科学引用本文复制引用
伍国柱,谭秋林,唐顺,魏坦勇,熊继军..基于基片集成波导和消逝模谐振腔的压力传感器设计∗[J].传感技术学报,2017,30(1):44-47,4.基金项目
国家自然科学基金项目(61471324)；国家杰出青年科学基金项目(51425505)；山西省青年拔尖人才支持计划项目 （61471324）
