铁酸铋薄膜退火工艺研究进展
Research Progress of Annealing Process of Bismuth Ferrite Thin Films
摘要
Abstract
Bismuth ferrite (BFO) multiferroic material has attracted great attention in the past decades due to their profound physical properties and broad application prospects in the fields of memory, sensors, capacitors and photovoltaic device. How-ever, it is very difficult to prepare pure-phase BFO thin films because of the volatilization of Bi element at high temperatures. In addition, the ferroelectric properties and the practical application of BFO thin films are severely restrained owing to the high leakage current density as a result of the possible defects, such as oxygen vacancies and the non-stoichiometry caused by the va-riable valency of ferric ions. It was well known that the annealing process was a very important factor that could affect the mi- crostructure and macro-properties of materials; therefore, it was a very effective method to control the structure and properties of BFO films through annealing process. Nevertheless, annealing process included various forms, such as annealing time, anneal-ing atmosphere, annealing temperature and annealing mode. Thus, it was worthy to discuss how each annealing form influenced the structure and properties of BFO thin films. For this reason, the research progress of annealing process (including annealing time, annealing atmosphere, annealing temperature and annealing mode) on the structures (grain size, shape, electric domain size, domain type and surface topography) and properties (magnetic and ferroelectric properties, dielectric and leakage proper-ties, conductive mechanism) of bismuth ferrite thin films is reviewed, and some imperative problems to be solved are proposed.关键词
多铁性材料/铁酸铋薄膜/缺陷/退火工艺/性能Key words
multiferroic material/bismuth ferrite films/defects/annealing process/properties分类
信息技术与安全科学引用本文复制引用
蔡雯馨,高荣礼,符春林,蔡苇,邓小玲,陈刚..铁酸铋薄膜退火工艺研究进展[J].表面技术,2017,46(2):77-86,10.基金项目
国家自然科学基金 (51372283、51402031、61404018) （51372283、51402031、61404018）
重庆市自然科学基金(CSTC2015jcyjA50015) （CSTC2015jcyjA50015）
重庆市教委科学研究项目(KJ1501310、KJ1501318) （KJ1501310、KJ1501318）
重庆高校创新团队建设计划资助项目(CXTDX201601032) （CXTDX201601032）
重庆科技学院博士基金(CK2015b05) （CK2015b05）
重庆科技学院院士专家工作站合作项目(CKYS2014Z01、CKYS2014Y04) （CKYS2014Z01、CKYS2014Y04）
重庆科技学院大学生科技创新项目Fund:Supported by the National Natural Science Foundation of China (Grant No. 51372283, 51402031, 61404018), the Natural Science Foun-dation Project of CQ(CSTC2015jcyjA50015), the Commission of Science and Technology Research Project of CQ(KJ1501310, KJ1501318), the Program for Innovation Teams in University of Chongqing, China (CXTDX201601032), the Foundation of Chongqing University of Science & Technology(CK2015B05), the cooperative project of academician workstation of Chongqing University of Science & Technolo-gy(CKYS2014Z01, CKYS2014Y04) and the student innovating projects of science and technology, Chongqing University of Science & Tech-nology. （Grant No. 51372283, 51402031, 61404018）
