光学精密工程2017，Vol.25Issue(2)：367-374,8.DOI:10.3788/OPE.20172402.0367
光学硬脆材料固结磨料研磨中的亚表面损伤预测
Subsurface damage prediction for optical Hard-brittle material in fixed abrasive lapping
摘要
Abstract
The correct prediction of subsurface damage (SSD) depth in lapping is an important basis for setting processing parameters.According to the lapping features of fixed abrasive,two typical optical hard-brittle materials (MgAl spinel and quartz glass) were selected to establish their respective two-dimensional discrete element models by using the discrete element method (DEM) and to analyze the impact on SSD (crack) depth of optical hard-brittle materials by above processing parameters.After that,an angle polishing method was used to measure the SSD depth of lapped MgAl spinel and quartz glass and to have it verified by experiment.The results show that when applying fixed abrasive for lapping,the abrasive particle size will have a significant impact on the SSDs of optical hard-brittle materials,which means under same lapping processing,the greater the abrasive particle size is,the deeper of SSD and the denser the micro cracks will be.The comparison between experimental results and DEM simulation results indicates that DEM is able to make quick and effective prediction on SSD depth of optical hard-brittle materials and to provide reference and guidance for subsequent lapping and polishing processing.关键词
光学硬脆材料/固结磨料研磨/离散元法/亚表面损伤Key words
optical hard brittle material/fixed abrasive lapping/discrete element method/subsurface damage分类
机械制造引用本文复制引用
朱永伟,李信路,王占奎,凌顺志..光学硬脆材料固结磨料研磨中的亚表面损伤预测[J].光学精密工程,2017,25(2):367-374,8.基金项目
国家自然科学基金资助项目(No.51675276) （No.51675276）
航空科学基金(2014ZE52055) （2014ZE52055）
江苏省精密与微细制造技术重点实验开放基金资助项目 （）
