光学精密工程2017，Vol.25Issue(2)：401-407,7.DOI:10.3788/OPE.20172402.0401
多模态动态原子力显微镜系统
Multi-mode dynamic atomic force microscope system
摘要
Abstract
Dynamic atomic force microscope (AFM) is able to measure the surface topography of objects by detecting the changes of resonance state of the cantilever.Through the detection on three factors of such resonance state,amplitude,phase and frequency,dynamic AFM could be divided into three kinds of working modes,which are amplitude feedback mode,phase feedback mode and frequency feedback mode,and such feedback modes have different scanning characteristics.Based on the higher-order resonance characteristics of the silicon cantilever,dymamic AFM is able to scan objects when the cantilever is working under the high-order resonance.By combining above working modes,a multi-mode dynamic AFM was developed,which could scan and measure the objects under the above three feedback modes and different order of resonance state.The results of scanning tests under different feedback modes and different order of resonance state by application such system show that the system has sub nanometer resolution in each working mode,in which the system can achieve the optimal sensitivity and resolution under phase feedback mode and when the cantilever runs under the second order resonance,which is 17.5V/μm and 0.29nm respectively.Uuder such optimal sensitivity and resolution,the three dimensional scanning test of grating is conducted to obtain its 3D topography image.关键词
动态AFM/振幅反馈/相位反馈/频率反馈/高阶谐振Key words
Dynamic AFM/amplitude feedback/phase feedback/frequency feedback/high-order resonance分类
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黄强先,张蕤,刘凯,赵阳,张连生..多模态动态原子力显微镜系统[J].光学精密工程,2017,25(2):401-407,7.基金项目
合肥工业大学青年教师创新资助项目(No.JZ2015HGQC0212) （No.JZ2015HGQC0212）
国家自然科学基金资助项目(No.50975075) （No.50975075）
