哈尔滨工程大学学报Issue(2)：258-262,5.DOI:10.11990/jheu.201510024
四象限传感器用于激光跟踪仪光斑偏移量测量
Use of a quadrant photodiode to measure spot offset of a laser tracker
摘要
Abstract
Signal processing in a quadrant photodiode used to track target movement velocity and reflect target displacement must provide rapid and accurate dynamic response for a laser tracker.According to the operation principle of a quadrant photodiode,we derived the relationship between the output signal and the spot offset using a diagonal algorithm for the transcendental function.Considering that it is not easy to solve the transcendental function,in combination with the laser spot characteristics,a Taylor series expansion algorithm was adopted.A verification experiment for the spot offset measurement system was performed using a high-precision rectangular coordinate measuring machine.The results show that the system possesses a fast measurement speed and high measurement accuracy.The measurement can reach 1050 times per second,and the accuracy is 6μm within a measurement range of ±400μm.The system can be widely applied in related fields in which a microdisplacement measurement is necessary.关键词
激光跟踪仪/四象限传感器/光斑偏移量/泰勒级数展开/测量系统Key words
laser tracker/quadrant photodiode/spot offset/Taylor series expansion/measurement system分类
机械制造引用本文复制引用
陈洪芳,谭志,石照耀,宋辉旭..四象限传感器用于激光跟踪仪光斑偏移量测量[J].哈尔滨工程大学学报,2017,(2):258-262,5.基金项目
国家重大科学仪器设备开发专项(2013YQ17053904). （2013YQ17053904）
