化工学报2016，Vol.67Issue(z1)：159-165,7.DOI:10.11949/j.issn.0438-1157.20160555
声表面波传感器温度频率特性的数值分析
Numerical analysis of temperature frequency characteristics of surface acoustic wave sensor
摘要
Abstract
Numerical simulation has been carried out concerning the temperature frequency characteristics of a surface acoustic wave (SAW) sensor with ANSYS software.The internal temperature distribution of delay line surface acoustic wave sensor with Si/AlN/Al structure was analyzed under a certain pressure.The results show the effect of natural convection on the temperature field and stress field distribution in the sensor is small.The relationship between the temperature and the output resonant frequency is also simulated.According to the data fitting,the output series resonant frequency of the SAW sensor has a good linear relationship with the environmental temperature,so it can be used in the precise measurement of the temperature.关键词
声表面波传感器/数值模拟/热传导/膜/微电子学/温度频率特性Key words
surface acoustic wave sensor/numerical simulation/heat conduction/membranes/microelectronics/temperature frequency characteristics分类
能源科技引用本文复制引用
李莺歌,马连湘,张娜,袁世魁,杜东兴..声表面波传感器温度频率特性的数值分析[J].化工学报,2016,67(z1):159-165,7.基金项目
国家自然科学基金项目(51476081).supported by the National Natural Science Foundation of China (51476081). （51476081）
