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一种新型单片集成光谱传感器的波长定标方法

张亚光 庄新港 王绪泉 刘俊良 方家熊 邵秀梅 王丽丽

红外与毫米波学报2017,Vol.36Issue(1):15-19,5.
红外与毫米波学报2017,Vol.36Issue(1):15-19,5.DOI:10.11972/j.issn.1001-9014.2017.01.004

一种新型单片集成光谱传感器的波长定标方法

Wavelength calibration of a new monolithically integrated spectral sensor

张亚光 1庄新港 2王绪泉 1刘俊良 3方家熊 4邵秀梅 1王丽丽2

作者信息

  • 1. 山东大学光学高等研究中心,山东济南250100
  • 2. 山东大学晶体材料国家重点实验室,山东济南250100
  • 3. 山东大学信息科学与工程学院,山东济南250100
  • 4. 中国科学院上海微系统与信息技术研究所传感技术联合国家重点实验室,上海200050
  • 折叠

摘要

Abstract

A new near-infrared monolithically integrated multichannel spectral sensor (MCSS) serves as a key component of Spectral-sensing Internet of Things (SSIOT).A wavelength calibration method for the MCSS was proposed.The method is based on the relative spectral response and includes specific principles of wavelength allocation.Several pixels comprised a channel with the calibrated wavelength.Experimental tests Were conducted in the calibrated MCSS and other two commercial spectrometers.The compared spectrum results demonstrated calibration accuracy of 1.8 nm on average,with performance as good as a commercial spectrometer equipped with similar FWHM and sampling intervals,which can meet the application demand.

关键词

短波红外/单片集成光谱传感器/波长定标/光谱传感物联网

Key words

shortwave infrared/monolithically integrated spectral sensor/wavelength calibration/spectral-sensing Internet of Things

分类

通用工业技术

引用本文复制引用

张亚光,庄新港,王绪泉,刘俊良,方家熊,邵秀梅,王丽丽..一种新型单片集成光谱传感器的波长定标方法[J].红外与毫米波学报,2017,36(1):15-19,5.

基金项目

Supported by the National Nature Science Foundation of China (61376052) (61376052)

the Project of State Key Laboratories of Transducer Technology (SKT1507) (SKT1507)

红外与毫米波学报

OA北大核心CSCDCSTPCDSCI

1001-9014

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