红外与毫米波学报2017，Vol.36Issue(1)：30-34,5.DOI:10.11972/j.issn.1001-9014.2017.01.007
一种近方脊滤波器的设计与快速制造
Facile design and rapid fabrication of a nearly-square ridge filter
摘要
Abstract
Filters are essential components of communication systems.A rapid and accurate fabrication method is presented in this paper for the design and fabrication of a waveguide filter.The filter was fabricated by using a multi-layer coating and one-time ultraviolet exposure lithography (SU-8 resist on a silicon wafer) to have dimensional fabrication errors of less than 3 μm in height and 1,1 ° in vertical angle deviation.We demonstrated the feasibility of the proposed class of filters and the fabrication method used and achieved a superior performance (with regard to:insertion loss,return loss,and bandwidth).Consequently the minimum passband insertion loss,which is practically negligible,was measured as being less than 0.5 dB while the return loss is greater than 10 dB during the passband,demonstrating that the chosen rapid fabrication technology is an effective method of terahertz device fabrication.The new trchnology should become a major driving force forging the future development of terahertz RF devices.关键词
SU-8微加工/微波/滤波器/矩形波导/W波段Key words
SU-8 micro-machining/microwave filter/RF MEMS/rectangular waveguide/W band分类
信息技术与安全科学引用本文复制引用
南雪莉,张斌珍,崔建利,杨昕,葛少雷..一种近方脊滤波器的设计与快速制造[J].红外与毫米波学报,2017,36(1):30-34,5.基金项目
Supported by National Science Foundation of China (51475438),Research Project Supported by Shanxi Scholarship Council of china (2014-055) and Graduate student education innovation project in Shanxi province (2016BY124) （51475438）
