应用化学2017，Vol.34Issue(3)：276-281,6.DOI:10.11944/j.issn.1000-0518.2017.03.160195
化学亚胺化程度对正性光敏聚酰亚胺影响
Effect of the Degree of Chemical Imidization on the Positive Photosensitive Polyimide
摘要
Abstract
Condensation polymerization of 2,2'-bis (trifluoromethyl)-4,4'-diamino biphenyl (TFDB) and 3,3',4,4'-tetracarboxydiphthalic ether dianhydride (ODPA) gives a soluble polyimide.The effect of the degree of chemical imidization on positive photosensitive polyimide performance was investigated by adjusting the content of α-picoline in the imidization reagent to control the extent of the imide.The results show that the photosensitive polyimide has the best developing performance when the mole ratio of α-picoline to acetic anhydride is 1 to 5 in the process of chemical imidization.关键词
正性光敏聚酰亚胺/化学亚胺化/溶解性/光刻Key words
positive photosensitive polyimide/chemical imidization/solubility/photolithography分类
化学化工引用本文复制引用
朱丹阳,金锐,吴作林,韩宝春,杨正华,张春华..化学亚胺化程度对正性光敏聚酰亚胺影响[J].应用化学,2017,34(3):276-281,6.基金项目
国家电网公司科技项目:高压IGBT芯片表面钝化工艺研究(5455DW150005)Supported by the Project of the State Grid Corporation:Technology of High Voltage IGBTchip Surface Passivation(No.5455DW150005) （5455DW150005）
