中国机械工程2017，Vol.28Issue(4)：470-477,8.DOI:10.3969/j.issn.1004-132X.2017.04.016
大面积纳米压印揭开式脱模机理和规律
Mechanism and Laws of Peel-off Demolding for Large-area Nanoimprint Lithography
摘要
Abstract
This paper investigated the mechanism and influencing factors of peel demolding for large-area nanoimprint lithography.A model estimating the air pressure-assisted peel-off demolding forces was established based on the interfacial adhesion energy.A model of predicting the critical speed of air pressure-assisted peel-off demolding was derived by the combination of the strain energy method and the conservation of energy in demolding stage.Furthermore,the influences and laws of the demolding process parameters (demolding force,demolding angle,demolding speed)were re-vealed by numerical simulation using ABAQUS software.关键词
大面积纳米压印/揭开式脱模/脱模力/脱模速度Key words
large-area nanoimprint lithography/peel-off demolding/demolding force/demolding speed分类
信息技术与安全科学引用本文复制引用
李延强,兰红波..大面积纳米压印揭开式脱模机理和规律[J].中国机械工程,2017,28(4):470-477,8.基金项目
国家自然科学基金资助项目(91023023,51375250) （91023023,51375250）
青岛市创业创新领军人才计划资助项目(13CX18) （13CX18）
