传感技术学报2017，Vol.30Issue(2)：230-235,6.DOI:10.3969/j.issn.1004-1699.2017.02.011
基于纳米时栅传感器安装偏差的测量精度分析研究
Measurement Precision Analysis Based on Assembly Errors ofa Nanometer Time-Grating Sensor
摘要
Abstract
In order to quantify the influences on measurement precision caused by assembly parameters,the gap d0 and effective overlap area variation ΔS between the fixed ruler and the moving ruler are employed as independent variables to build mathematical models for measurement precision analysis based on the principles of nanometer time-grating sensors.Second harmonics errors are deduced in theory and tranced back in terms of unequal amplitude and phase deviation for two channels of standing waves when the moving ruler is not parallel to yz-plane or deviate from yz-plane.Experiment results show that the original errors for one pitch decrease from 4.86 μm to 0.84 μm by adjusting the assembly parameters of the moving ruler in the yz-plane and xy-plane,which demonstrates that second harmonics error is caused by un-parallel to yz-plane or deviation from yz-plane for moving ruler.The peak-to-peak value of the measurement error is 400 nm within 200 mm measurement range.The proposed theoretical analysis is valid by the experimental results,and provide strong supporting for optimizing the sensor's structure parameters and improving experimental methods,which is very valuable for improving the measurement precision of nanometer time-grating sensor as reliable theory.关键词
纳米测量/时栅/安装/误差理论Key words
nanometer measurement/time grating/assembly/theory of error分类
机械制造引用本文复制引用
王合文,吴玉梅,郑方燕,但敏,樊星辰..基于纳米时栅传感器安装偏差的测量精度分析研究[J].传感技术学报,2017,30(2):230-235,6.基金项目
重庆市基础与前沿研究计划项目(cstc2014jcyjA70002,cstc2016jcyjA0505) （cstc2014jcyjA70002,cstc2016jcyjA0505）
