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光学浮区法生长掺铟氧化镓单晶及其性能

吴庆辉 唐慧丽 苏良碧 罗平 钱小波 吴锋 徐军

硅酸盐学报2017,Vol.45Issue(4):548-552,5.
硅酸盐学报2017,Vol.45Issue(4):548-552,5.DOI:10.14062/j.issn.0454-5648.2017.04.14

光学浮区法生长掺铟氧化镓单晶及其性能

Growth and Properties ofβ-Ga2O3:In Single Crystal by Optical Floating Zone Method

吴庆辉 1唐慧丽 2苏良碧 3罗平 4钱小波 1吴锋 2徐军3

作者信息

  • 1. 中国科学院上海硅酸盐研究所人工晶体研究中心,上海 201800
  • 2. 中国科学院上海硅酸盐研究所,透明光功能无机材料重点实验室,上海 201899
  • 3. 同济大学物理科学与工程学院,上海200092
  • 4. 上海蓝宝石单晶工程技术研究中心(筹),上海 201899
  • 折叠

摘要

Abstract

β-Ga2O3:In single crystal with 30?35mm in length and 7?9mm in diameter was grown by an optical floating zone method. Based on the X-ray diffraction analysis,β-Ga2O3:In single crystal obtained belongs to a monoclinic crystal system. The absorption spectra and electric properties ofβ-Ga2O3:In crystal doped with different mole fractions of In3+ were investigated. The results indicate that compared to pureβ-Ga2O3 crystal,β-Ga2O3:In single crystal has an intense absorption in the infrared band. The conductivity ofβ-Ga2O3:In single crystal is above 10-2 S/cm, and the carrier density can achieve 6×1019/cm2. It is indicated that the doping of In3+ could improve the electrical properties of theβ-Ga2O3 single crystal.

关键词

铟掺杂氧化镓单晶/晶体生长/浮区法

Key words

In-doped gallium oxide single crystal/crystal growth/optical floating zone method

分类

数理科学

引用本文复制引用

吴庆辉,唐慧丽,苏良碧,罗平,钱小波,吴锋,徐军..光学浮区法生长掺铟氧化镓单晶及其性能[J].硅酸盐学报,2017,45(4):548-552,5.

基金项目

国家自然科学基金项目(91333106) (91333106)

上海科委科技攻关项目(13521102700) (13521102700)

上海蓝宝石单晶工程技术研究中心(筹)(14DZ2252500)资助项目 (筹)

中央高校基本科研业务费专项资金项目(2015KJ040,1370219229). (2015KJ040,1370219229)

硅酸盐学报

OA北大核心CSCDCSTPCD

0454-5648

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