光学精密工程2017，Vol.25Issue(3)：576-583,8.DOI:10.3788/OPE.20172503.0576
数字全息术用于光学元件表面缺陷形貌测量
Measurement of surface defects of optical elements using digital holography
摘要
Abstract
In order to measure the three-dimensional microstructure of surface defects on optical components,a novel measuring system based on digital image-plane holographic microscopy (DIPHM) was proposed and experimentally designed.The optical path of the system was built to record digital holograms,which comprised phase information of object light.The object light wavefront was reconstructed by the angular spectrum algorithm,and the wavefront distortion attributed to the system errors was eliminated via phase correction.Therefore the phase distribution of the object light modulated by the surface defects was obtained.By deducing the relationship between the object light wavefront and the surface topography,the 3D microstructure of the surface defects was determined.Furthermore,some optics with scratches and pits were measured as samples.For one scratch with width of 35.00 μm and depth of 270.0 nm,the measuring results were as follows:the width is 35.21 μm and the depth of 267.6 nm,thereby the transverse and vertical errors are 0.6％ and 0.9％ respectively.The results indicate that this measuring method can determine the 3D microstructure of surface defects on optics feasibly and accurately.In addition,it is helpful to judge the damage degree of the optical component and analysis the influence of surface defects,thus of great significance to ensure the laser system security running.关键词
数字全息显微术/三维形貌测量/光学元件/表面缺陷/相位修正Key words
digital holographic microscopy/three-dimensional microstructure measurement/optical component/surface defects/phase correction分类
数理科学引用本文复制引用
陈竹,姜宏振,刘旭,陈波..数字全息术用于光学元件表面缺陷形貌测量[J].光学精密工程,2017,25(3):576-583,8.基金项目
国家科技重大专项课题(No.2013XXX) （No.2013XXX）
