现代制造工程Issue(1)：29-34,6.DOI:10.16731/j.cnki.1671-3133.2017.01.006
具有混合晶圆流的单臂组合设备建模及调度
Modeling and scheduling of single-armed cluster tools with mixed wafer flows
摘要
Abstract
For improving the efficiency of cluster tools availably,the issues for processing different types of wafers concurrently in single-armed cluster tools are studied.A Petri net model describing the process of the single-armed cluster tools precisely,which is independent of diverse wafer flow pattern,is developed.Some equations,which define that the single-armed cluster tools is capable of performing a steady and cyclic operation under mixed wafer flows,are derived based on backward and cyclic scheduling strategy.Furthermore,the linear programming model is established and a periodic steady-state schedule is obtained as well.The presented scheduling is executed by the means of virtual wafer and the Gantt chart of scheduling is provided.Finally,the validity and efficiency of the proposed model and scheduling is verified.关键词
组合设备/Petri网/建模/调度/晶圆制造Key words
cluster tools/Petri net/modeling/scheduling/wafer fabrication分类
信息技术与安全科学引用本文复制引用
潘春荣,王际鹏,黎良..具有混合晶圆流的单臂组合设备建模及调度[J].现代制造工程,2017,(1):29-34,6.基金项目
国家自然科学基金资助项目(71361014) （71361014）
江西省教育厅项目(GJJ150673) （GJJ150673）
