现代制造工程Issue(2)：30-34,5.DOI:10.16731/j.cnki.1671-3133.2017.02.006
镁合金AZ91D化学机械抛光工艺研究
Study on chemical mechanical polishing process for magnesium alloy AZ91D
摘要
Abstract
The Chemical Mechanical Polishing (CMP) technology was introduced into magnesium alloy surface ultra-precision process,silica sol,active agent,chelating agent,pH regulator was used to prepare polishing solution by vortex mixing.At the same time,the effect of pressure,rotation,flow rates of sully process and time on the polishing were analyzed by singer factor test.The experimental results showed that:the pressure is 0.06MPa,upper plate speed is 10r/rain,lower plate speed is 50r/min,flow rates of slurry is 160mL/min,polishing time is 8min,the alloy surface morphology is good;under optimum conditions after chemical mechanical polishing,the surface roughness Ra of the alloy can reach 10nm.关键词
化学机械抛光/镁合金/工艺参数/表面粗糙度Key words
Chemical Mechanical Polishing(CMP)/magnesium alloy/process parameters/surface roughness分类
化学化工引用本文复制引用
黄华栋,卞达,杨大林,赵永武,吴冬燕..镁合金AZ91D化学机械抛光工艺研究[J].现代制造工程,2017,(2):30-34,5.基金项目
国家自然科学基金资助项目(51675232,51005102) （51675232,51005102）
江苏高校品牌专业建设工程项目(PPZY2015B186) （PPZY2015B186）
江苏高校高级访问学者资助项目 （）
江苏高校“青蓝工程”资助项目 （）
苏州市教科研资助项目(GJNP201617) （GJNP201617）
苏工院教科研资助项目 （）
