机械与电子2017，Vol.35Issue(3)：3-7,5.
玻璃基微纳通道制造与阻值规律研究
Study on Manufacturing and Resistance Law of Glass Micro-nanochannel
摘要
Abstract
The blocking phenomenon appears in the tip of the micro-nanochannel fabricated with the glass capillary heating system.A set of grinding needle gauge and electricity measurement system was established for improving the micro-nanochannel manufacturing technology and studying the rules of the resistance of the channel.Firstly, the glass capillary with the outer diameters between 1.5~10 μm was produced by the glass capillary heating;And then, the tip of the capillary was grinded by the grinding needle gauge which was manufactured based on the ultrasonic motor and the vibration principles.Secondly, the electricity measurement method was used to identify whether the tip after grinding was the channel.The internal resistance value of the tip of the glass channel whose inner diameter under 10 microns was calculated by the fitting function with the interpolation method, and the relevant laws between the resistance and the inner diameter were studied.The experimental results show that the glass micro-nanochannel with inner diameter less than 2μm can be successfully produced by the grinding needle gauge, and the resistance in the channel is inversely proportional to the inner diameter of the channel.关键词
直线超声电机/弯曲振动/微纳通道/电测法Key words
linear ultrasonic motor/bending vibration/micro-nanochannel/electrometric method分类
机械制造引用本文复制引用
吴必成,姚志远,张亚飞..玻璃基微纳通道制造与阻值规律研究[J].机械与电子,2017,35(3):3-7,5.基金项目
国家自然科学基金资助项目(51275229) （51275229）
国家重大仪器设备开发专项(2012YQ100225) （2012YQ100225）
