表面技术2017，Vol.46Issue(4)：258-263,6.DOI:10.16490/j.cnki.issn.1001-3660.2017.04.042
大粒径SiO2磨粒固结磨具加工蓝宝石试验研究
Experimental Study on Processing of Sapphire with Bonded Large Particle Size SiO2 Grain Bonded Grain Bonded Abrasive Tool
摘要
Abstract
The wok aims to verify effectiveness of processing of sapphire with bonded large particle size (>30μm) SiO2 grain bonded abrasive tool, optimize abrasive tool formulas and provide effective reference for high efficiency, high quality and low cost processing of sapphire wafer. With magnesium oxychloride cement as binder, bonded SiO2 grain bonded abrasive tools with different formulas were fabricated to process sapphire. Removal rate and surface quality were taken as evaluation indices to study the effects of particle size, binder proportion and grain percentage on processing effects. The sapphire was processed by six kinds of SiO2 grain bonded abrasive tools of different particle sizes (all >30μm). Surface roughness was improved. The smaller the particle size was, the better the improvement effect was. The removal rate and roughness were influenced by the mole ratio of active MgO, MgCl2 and H2O. The higher the abrasive grain content was, the higher removal rate was, and the smaller surface quality was. In the magnesium oxychloride binder, the molar ratio of active MgO:MgCl2:H2O was 7:1:16; 325# SiO2 was used as abrasives, and the grain mass accounted for 60% of the binder mass. Abrasive tool is made to process sapphire with revolving speed of 210 r/min, load of 0.4 MPa, processing duration of 3 h. The average removal rate is 17μm/h, and the surface roughnessRa increases from initial average 345 nm to average 9 nm.关键词
SiO2/氯氧镁结合剂/固结磨具/大粒径/蓝宝石/固相反应Key words
SiO2/magnesium oxychloride binder/bonded abrasive tool/large particle size/sapphire/solid phase reaction分类
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王洁,袁巨龙,吕冰海,吕迅,曹霖霖,彭超飞..大粒径SiO2磨粒固结磨具加工蓝宝石试验研究[J].表面技术,2017,46(4):258-263,6.基金项目
国家自然科学基金项目(51575492) （51575492）
浙江省教育厅科研项目(Y201326972) （Y201326972）
浙江省教育厅高校访问学者教师发展项目(FX2014149) Supported by the National Natural Science Foundation of China (51575492), Education Department Researchof Zhejiang Province (Y201326972) and the Development Project of Visiting Scholar Teachers in Colleges and Universities of Zhejiang Province Educational De-partment (FX2014149) （FX2014149）
