传感技术学报2017，Vol.30Issue(3)：348-352,5.DOI:10.3969/j.issn.1004-1699.2017.03.003
PdCr薄膜电阻应变计研制及其高温应变敏感性能研究
Fabrication of PdCr Thin Film Strain Gauge and Investigation on Its Sensitive Properties at High Temperature
刘豪 1蒋书文 1蒋洪川 1赵晓辉 1张万里1
作者信息
- 1. 电子科技大学电子薄膜与集成器件国家重点实验室,成都 610054
- 折叠
摘要
Abstract
For aerospace and nuclear fields at high temperatures,strain gauge that can be used in various hot sections is in urgent need to provide accurate measurement of strain,fatigue and other structural parameters.PdCr thin film resistive strain gauges were fabricated on the nickel-based superalloy substrate.NiCrAlY alloy as a buffer layer was first deposited to enhance the adhesion of the following layers,YSZ/Al2O3 as a composite insulating layer was then prepared to obtain the required electric insulation,then PdCr thin film as the sensing material was sputtered,and patterned using the metal mask,finally Al2O3 thin film layer as a high temperature protective overcoat was deposited.The gauge factor,apparent strain and drift strain of PdCr thin film strain gauge at different temperatures were investigated.The results indicated that resistance value of PdCr thin film strain gauge showed an excellent linear relationship with strain at different temperatures.Gauge factor(GF)of PdCr thin film strain was measured to be 1.40 at room temperature;At 800 ℃,apparent strain sensitivity is 127 με/℃,and the resistance value of the strain gauge insignificantly decreased with time and the drift strain was about 1 800 με/hr.Gauge factor at 800 ℃ was 1.41,almost the same as that of room temperature.The reproducibility and lifetime of PdCr thin film strain gauge were also evaluated.It showed that the repeatable measurement error was 5.71%,and lifetime was over 10 hours.关键词
PdCr/薄膜应变计/敏感系数/高温应变测量Key words
PdCr/thin film strain gauge/gauge factor/high temperature strain measurement分类
信息技术与安全科学引用本文复制引用
刘豪,蒋书文,蒋洪川,赵晓辉,张万里..PdCr薄膜电阻应变计研制及其高温应变敏感性能研究[J].传感技术学报,2017,30(3):348-352,5.
