传感技术学报2017，Vol.30Issue(3)：368-372,5.DOI:10.3969/j.issn.1004-1699.2017.03.006
常压等离子体射流沉积ZnO及其传感特性研究
The Application of ZnO Thin Film Humidity Sensor Fabricated by Atmospheric Pressure Plasma Jet
摘要
Abstract
The deposition of ZnO thin films by an atmospheric pressure plasma jet(APPJ)is presented.The APPJ is generated by an AC power source with a repetitive frequency up to 20 kHz using N2 as the plasma gas.And Zn(NO3)2 precursor solution for ZnO was sprayed into the downstream of the APPJ.With the optimized retention time and jet temperature,a nearly full conversion of the precursor solution to ZnO thin films had been conducted.The ZnO thin films were first characterized by XRD,SEM,UV-Vis and etc.Then,the humidity sensing characteristics such as sensitivity and hysteresis of resulted film was studied.The results indicated that the ZnO films with deposition time of 5 min has the sensitivity of 0.435 pF/% RH and 19.634 pF/% RH under the low and high humidity level.The lower hysteresis and the shorter response time was also obtained.关键词
湿度传感器/常压等离子体/电容式/气溶胶/ZnOKey words
humidity sensor/atmospheric pressure plasma/capacitive/aerosol/ZnO分类
信息技术与安全科学引用本文复制引用
韩琦,黄淳,张健..常压等离子体射流沉积ZnO及其传感特性研究[J].传感技术学报,2017,30(3):368-372,5.基金项目
国家自然科学基金(61076070) （61076070）
