传感技术学报2017,Vol.30Issue(3):397-401,5.DOI:10.3969/j.issn.1004-1699.2017.03.011
高精度数字式MEMS陀螺仪驱动闭环控制系统设计
Design of High Precision Digital Closed-Loop DriveControl System of MEMS Gyroscope
童紫平 1张欢阳 1乔伟 1贺克军 1张紫乾 1龙善丽1
作者信息
- 1. 华东光电集成器件研究所,苏州 215163
- 折叠
摘要
Abstract
A digital closed-loop drive control system is designed for improving the detection sensitivity of MEMS Gyroscope.The system adopts a digital phase-locked loop(PLL)to track the resonant frequency and phase of the gyroscope.And a digital automatic gain control(AGC)method is utilized to control the amplitude constant.All algorithms are simulated by MATLAB/Simulink and tested on a high performance core Field Programmable Gate Array(FPGA)chip.The experiment results indicate that the startup time of the gyroscope is about 0.6 s,the drive amplitude stability is less than 10×106 and the velocity bias stability is 10.448 °/hr.关键词
微机械陀螺/数字闭环驱动/FPGA/锁相环/自动增益/MATLAB/SimulinkKey words
MEMS Gyroscope/Digital closed-loop drive/FPGA/PLL/AGC/MATLAB/Simulink分类
信息技术与安全科学引用本文复制引用
童紫平,张欢阳,乔伟,贺克军,张紫乾,龙善丽..高精度数字式MEMS陀螺仪驱动闭环控制系统设计[J].传感技术学报,2017,30(3):397-401,5.