硅酸盐通报2017，Vol.36Issue(3)：859-863,5.
氟硅酸盐制取四氟化硅的研究进展
Research Progress on Preparation of Silicon Tetrafluoride from Fluorosilicate
蔡苗 1唐安江 2王乐深 1何元琴 1何磊1
作者信息
- 1. 贵州大学化学与化工学院,贵阳 550025
- 2. 贵州理工学院化学工程学院,贵阳 550003
- 折叠
摘要
Abstract
SiF4 is widely used in the electronics industry and the semiconductor industry, preparation of SiF4 by fluorosilicate is a kind of preparation method.In this paper, the properties and preparation methods of fluorosilicate are introduced.The method of preparing SiF4 by fluorosilicate is introduced.The conditions and products of SiF4 prepared by fluorosilicate were compared.关键词
四氟化硅/氟硅酸盐/分解/工艺Key words
silicon tetrafluoride/fluorosilicate/dissociation/technology分类
化学化工引用本文复制引用
蔡苗,唐安江,王乐深,何元琴,何磊..氟硅酸盐制取四氟化硅的研究进展[J].硅酸盐通报,2017,36(3):859-863,5.
