硅酸盐学报2017，Vol.45Issue(3)：402-409,8.DOI:10.14062/j.issn.0454-5648.2017.03.12
固结磨料研磨镁铝尖晶石的平均切深和亚表面损伤行为
Average Cutting Depth and Subsurface Damage of Spinel Induced by Lapping with Fixed Abrasive Pad
摘要
Abstract
A model of average cutting depth in lapping with a fixed abrasive (FA) pad was proposed based on the particle contact mechanics, and the average cutting depths lapped with different size abrasive FA pads were estimated. Furthermore, the lapping process with FA pad for spinel was simulated by discrete element method (DEM) based on the average cutting depth, predicting the subsurface damage of wafer induced by lapping. The prediction was verifiedviathe measurement of the subsurface damage (SSD) lapped with FA pad by an angle polishing method. The results indicate that the predicted depth of subsurface damage with W5 particles is 1.32μm and the measured value is 1.37μm; the predicted depth of subsurface damage with W14 particles is 3.93μm and the measured value is 4.56μm; the predicted depth of subsurface damage with W50 particles is 9.07μm and the measured value is 9.12μm. The predicted data agree well with the measured values. The prediction can offer a theoretical approach for controlling the subsurface damage and optimizing the process parameters in FA lapping.关键词
镁铝尖晶石/亚表面损伤/研磨/固结磨料Key words
spinel/subsurface damage/lapping/fixed abrasive分类
化学化工引用本文复制引用
王占奎,朱永伟,李信路,朱楠楠,李军,苏建修,左敦稳..固结磨料研磨镁铝尖晶石的平均切深和亚表面损伤行为[J].硅酸盐学报,2017,45(3):402-409,8.基金项目
航空科学基金(2014ZE52055) （2014ZE52055）
国家自然科学基金(51675276),河南省高等学校重点科研项目(15A460004) （51675276）
江苏省研究生培养创新工程(KYLX_0229) （KYLX_0229）
中央高校基本科研业务费专项资金 （）
江苏省精密与微细制造技术重点实验室开放基金资助. （）
