计量学报2017，Vol.38Issue(2)：141-144,4.DOI:10.3969/j.issn.1000-1158.2017.02.03
Mirau干涉型微纳台阶高度测量系统的研究
Research on Micro/nano Step Height Measurement System of Mirau Interference
摘要
Abstract
In order to realize the rapid measurement of the nanometer scale to the micro 3D step sample height, on the basis of ordinary optical microscope, a micro/nano step height measuring device is reconstructed.The whole hardware structure is designed.The measurement and control software and data processing software are programmed.Combined with Hilbert transform and wavelet transform, a new method of algorithm which is used for the reconstruction of 3D surface topography is proposed.The step samples of different height is used to test.The measurement results indicate that this system has high measurement accuracy and high repeatability, and its measurement range in vertical direction is not less than 50 μm.关键词
计量学/Mirau干涉/微纳台阶高度测量/三维表面形貌测量/白光显微干涉/光学显微镜Key words
metrology/Mirau interference/micro/nano step height measurement/3D surface topography measurement/white light microscope interference/optical microscope分类
通用工业技术引用本文复制引用
郭鑫,施玉书,皮磊,张树,李适,李东升,高思田..Mirau干涉型微纳台阶高度测量系统的研究[J].计量学报,2017,38(2):141-144,4.基金项目
国家重点研发计划(2016YFF0200602) （2016YFF0200602）
中国计量科学研究院基本科研业务费(AKY1605) （AKY1605）
