人工晶体学报2017，Vol.46Issue(3)：550-554,561,6.
温和氢气等离子体对薄层二硫化钼的影响研究
Investigation on Few-layer MoS2Treated by Soft Hydrogen Plasma
摘要
Abstract
As a two-dimensional transition-metal dichalcogenide (TMDC), few-layer molybdenum disulfide (MoS2) possesses excellent optical and electrical properties and thus shows a great prospect in the field of optoelectronic functional devices.In this work, mechanically exfoliated few-layer MoS2 flakes were treated by a novel soft hydrogen plasma followed by post annealing and the resultant variations in both optical and electrical properties were systematically investigated.It has been demonstrated that hydrogen atoms may penetrate into MoS2 lattices with the help of soft hydrogen plasma and consequently change pristine lattice structure as well as lattice vibration, leading to fluorescence quenching and at the same time making n-type few-layer MoS2 become intrinsic or p-type doping.Post annealing after soft hydrogen plasma treatment may induce the bonding of a very few MoS2 molecules with hydrogen atoms, giving rise to the bule shift of optical band gap.关键词
薄层二硫化钼/温和等离子体/拉曼光谱/荧光/场效应晶体管Key words
few-layer molybdenum disulfide/soft plasma/Raman spectrum/fluorescence/field effect transistor (FET)分类
信息技术与安全科学引用本文复制引用
张学成,肖少庆,南海燕,张秀梅,闫大为,顾晓峰..温和氢气等离子体对薄层二硫化钼的影响研究[J].人工晶体学报,2017,46(3):550-554,561,6.基金项目
国家自然科学基金(61404061) （61404061）
江苏省自然科学青年基金(BK20140168) （BK20140168）
江苏省产学研联合创新资金(BY2014023-19) （BY2014023-19）
